PARADISEWORLD-2 / Modules

<< PARADISEWORLD-2 >> Modules

<< PARADISEWORLD-2 >> consists of unique modules as follows. (3D OPTION is here.)

Framework

--PW(ParadiseWorld)
PW is the top module.
The other modules are executed as its child processes.

[Main Features]

Loads parameter files.
Executes submodules.
Selection dataset that used by simualation.

Layout Pattern Viewer

--PALM(PAttern Layout Monitor )
PALM can display, rotate, expand and reduce LSI layout pattern very fast. It can also specify each layer by selectively displaying them or changing their colors.
It has a simple editor of layout pattern.

[Main Features]

Displays and edits 1 GB-class layout pattern (GDS-II file).
Designates a cut-line and cut-area for profile simulation.
Transfers the viewpoint to a designated position in high-speed.
Displays patterns translucently.

Mask layout structure viewer

--LION(Layer Image Output routine by NTT)
LION displays vertical layer structure (mask pattern) of layout patterns along the cut-line.
If a user specifies a new cut-line in PALM, the structure display changes with it.
A user can also modify this mask pattern independently from the layout pattern.

[Main Features]

Create a new mask by set caluculation (AND, OR, NOT, etc.) among layers.
Re-sizes patterns.
Outputs mask data(interface to other simulators)

Cross-section profile shimulator

--TIGER(Topography Image GEneration Routine)
TIGER simulates and displays cross-section profile of LSI along the user-specified cut-line in the layout pattern of PALM, according to the user-defined process table which specifies process conditions and model parameters in etching, depositioning, etc.

[Main Features]

Controls execution.(to pause, restart, etc.)
Stores a cross-section profile temporarily and reloads it.
Simulates pattern fluctuations. (offset & shift)
Edits a profile for the effect of dust and pattern defects.
Makes a various viewing as expansion, etc.
Shows material of a pointed position.
Measures distances.
Saves and Loads simulated porilfes.

Coupling capacitance / resistance simulator

--CARP(Capacitance And Resistance analysis Program)
CARP simulates capacitances, electric potential distribution among wires and resistances of wires according to a cross-section profile of TIGER as a 2D structure.

[Main Features]

Calulates coupling capacitance.
Displays th potential distribution.
Calculates resistance.
Displays the flow of the current.

Parameter editor

--PENGUIN(Parameter ENtry and Generalization User-INterface)
PENGUIN edits various data used by PALM, LION, TIGER and CARP.
It can control process step by step and edit data at each step so a user can modify process conditions and model parameters and check the result on the fly.

[Main Features]

Manages data files.(standardized operation)
Edits parameters of a process sequence table and simulates a cross sectional profile interactively.

Dataset editor

--DSEDIT(DataSetEDITor)
DSEDIT handles each dataset as a whole.
A dataset is a categoraized data gathering in a parameter file.
It gives a user a great convenience for parameter file handling.

[Main Features]

Transfers datasets among parameter files.
Eliminates datasets.

Inquiry is

Mathematical Systems Inc. << PARADISEWORLD >> charge <pw-info@msi.co.jp>

Framework --PW(ParadiseWorld) PW is the top module. The other modules are executed as its child processes. [Main Features] Loads parameter files. Executes submodules. Selection dataset that used by simualation.
Layout Pattern Viewer --PALM(PAttern Layout Monitor ) PALM can display, rotate, expand and reduce LSI layout pattern very fast. It can also specify each layer by selectively displaying them or changing their colors. It has a simple editor of layout pattern. [Main Features] Displays and edits 1 GB-class layout pattern (GDS-II file). Designates a cut-line and cut-area for profile simulation. Transfers the viewpoint to a designated position in high-speed. Displays patterns translucently.
Mask layout structure viewer --LION(Layer Image Output routine by NTT) LION displays vertical layer structure (mask pattern) of layout patterns along the cut-line. If a user specifies a new cut-line in PALM, the structure display changes with it. A user can also modify this mask pattern independently from the layout pattern. [Main Features] Create a new mask by set caluculation (AND, OR, NOT, etc.) among layers. Re-sizes patterns. Outputs mask data(interface to other simulators)
Cross-section profile shimulator --TIGER(Topography Image GEneration Routine) TIGER simulates and displays cross-section profile of LSI along the user-specified cut-line in the layout pattern of PALM, according to the user-defined process table which specifies process conditions and model parameters in etching, depositioning, etc. [Main Features] Controls execution.(to pause, restart, etc.) Stores a cross-section profile temporarily and reloads it. Simulates pattern fluctuations. (offset & shift) Edits a profile for the effect of dust and pattern defects. Makes a various viewing as expansion, etc. Shows material of a pointed position. Measures distances. Saves and Loads simulated porilfes.
Coupling capacitance / resistance simulator --CARP(Capacitance And Resistance analysis Program) CARP simulates capacitances, electric potential distribution among wires and resistances of wires according to a cross-section profile of TIGER as a 2D structure. [Main Features] Calulates coupling capacitance. Displays th potential distribution. Calculates resistance. Displays the flow of the current.
Parameter editor --PENGUIN(Parameter ENtry and Generalization User-INterface) PENGUIN edits various data used by PALM, LION, TIGER and CARP. It can control process step by step and edit data at each step so a user can modify process conditions and model parameters and check the result on the fly. [Main Features] Manages data files.(standardized operation) Edits parameters of a process sequence table and simulates a cross sectional profile interactively.
Dataset editor --DSEDIT(DataSetEDITor) DSEDIT handles each dataset as a whole. A dataset is a categoraized data gathering in a parameter file. It gives a user a great convenience for parameter file handling. [Main Features] Transfers datasets among parameter files. Eliminates datasets.